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E Beam Evaporation Pdf Free

 
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MessagePosté le: Mer 5 Oct - 09:41 (2016)    Sujet du message: E Beam Evaporation Pdf Free Répondre en citant




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EBPVD,systems,are,equipped,with,ion,sources.,Heating,,of,,the,,substrate,,allows,,for,,increased,,adatom,,-,,substrate,,and,,adatom,,-,,film,,diffusion,,by,,giving,,the,,adatoms,,sufficient,,energy,,to,,overcome,,kinetic,,barriers.,,The,,vapors,,are,,carried,,by,,the,,reactive,,gas,,,which,,is,,oxygen,,in,,case,,of,,metal,,oxides,,or,,acetylene,,in,,case,,of,,metal,,carbides.,,Kurt,,,J.,,,The,substrate,holder,is,attached,to,the,manipulator,shaft.,Low,energy,ions,are,used,for,the,surfaces,of,semiconductor,films.,The,,,manipulator,,,shaft,,,moves,,,translationally,,,to,,,adjust,,,the,,,distance,,,between,,,the,,,ingot,,,source,,,and,,,the,,,substrate.,,,See,,,also[edit].,,,If,,,a,,,rough,,,film,,,,such,,,as,,,metallic,,,nanorods,[5],,,is,,,desired,,,substrate,,,cooling,,,with,,,water,,,or,,,liquid,,,nitrogen,,,may,,,be,,,employed,,,to,,,reduce,,,diffusion,,,lifetime,,,,positively,,,bolstering,,,surface,,,kinetic,,,barriers.To,,,further,,,enhance,,,film,,,roughness,,,,the,,,substrate,,,may,,,be,,,mounted,,,at,,,a,,,steep,,,angle,,,with,,,respect,,,to,,,the,,,flux,,,to,,,achieve,,,geometric,,,shadowing,,,where,,,incoming,,,line,,,of,,,sight,,,flux,,,lands,,,onto,,,only,,,higher,,,parts,,,of,,,the,,,developing,,,film.,,,

Certain,,refractory,,oxides,,and,,carbides,,undergo,,fragmentation,,during,,their,,evaporation,,by,,the,,electron,,beam,,,resulting,,in,,a,,stoichiometry,,that,,is,,different,,from,,the,,initial,,material.,,The,,,deposition,,,rate,,,in,,,this,,,process,,,can,,,be,,,as,,,low,,,as,,,1nm,,,per,,,minute,,,to,,,as,,,high,,,as,,,few,,,micrometers,,,per,,,minute.,,,However,,,when,,vapor,,deposition,,is,,performed,,at,,pressures,,of,,roughly,,104,,Torr,,(1.3,,x,,104,,hPa),,or,,higher,,,significant,,scattering,,of,,the,,vapor,,cloud,,takes,,place,,such,,that,,surfaces,,not,,in,,sight,,of,,the,,source,,can,,be,,coated.,,Strictly,,,speaking,,,,the,,,slow,,,transition,,,from,,,line-of-sight,,,to,,,scattered,,,deposition,,,is,,,determined,,,not,,,only,,,by,,,pressure,,,(or,,,mean,,,free,,,path),,,but,,,also,,,by,,,source-to-substrate,,,distance.,,,The,thermal,energy,that,is,produced,heats,up,the,evaporation,material,causing,it,to,melt,or,sublimate.,The,electron,beam,causes,atoms,from,the,target,to,transform,into,the,gaseous,phase.,The,,,ion,,,beams,,,bombard,,,the,,,surface,,,and,,,alter,,,the,,,microstructure,,,of,,,the,,,film.,,,Brett.,,,For,example,,alumina,,when,evaporated,by,electron,beam,,dissociates,into,aluminum,,AlO3,and,Al2O.,

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